MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function

Jia Mengjun; Li Xinxin; Song Zhaohui; Wang Yuelin

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Article Navigation > Journal of Semiconductors > 2007 > 28(8): 1295-1301

Jia Mengjun, Li Xinxin, Song Zhaohui, Wang Yuelin. MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function[J]. Journal of Semiconductors, 2007, 28(8): 1295-1301. ****Jia M J, Li X X, Song Z H, Wang Y L. MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function[J]. Chin. J. Semicond., 2007, 28(8): 1295.

Citation:

Jia Mengjun, Li Xinxin, Song Zhaohui, Wang Yuelin. MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function[J]. Journal of Semiconductors, 2007, 28(8): 1295-1301. ****

Jia M J, Li X X, Song Z H, Wang Y L. MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function[J]. Chin. J. Semicond., 2007, 28(8): 1295.

Citation:

Jia M J, Li X X, Song Z H, Wang Y L. MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function[J]. Chin. J. Semicond., 2007, 28(8): 1295.

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MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function

Graduate University of the Chinese Academy of Sciences,Shanghai 200050,China
State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China
State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China
State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China
State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

Received Date: 2015-08-18
Accepted Date: 2007-01-04
Revised Date: 2007-03-07
Published Date: 2007-08-08

Abstract

Abstract

Based on the electro-mechanical coupling principle,a shocking-acceleration switch with a threshold adjusting function is presented.The threshold acceleration is set by adjusting the bias voltage.Based on a theoretical analysis for an inertial step-signal,the transient response of the switch in terms of half-sinusoidal,pulsed,and stepped shocking acceleration is simulated using Coventor-Ware.The threshold of the switches ranges from 1000g to 5000g,and the response time is less than 60μs.A fabricated micro-switch array has been tested,resulting in satisfactory switching capability under shocking acceleration,which agrees well with the design.
- :MEMS,
- shocking-acceleration switch,
- threshold adjusting function,
- latching function,
- electro-mechanical coupling principle

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