Chin. J. Semicond. > 1983, Volume 4 > Issue 5 > 455-463
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硅中激光退火点缺陷的钝化/消除

卢励吾 , 许振嘉 , 蔡田海 and 阮圣央

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    Received: 20 August 2015 Revised: Online: Published: 01 May 1983

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      Article Navigation >  Journal of Semiconductors  > 1983  >  4(5): 455-463
      卢励吾, 许振嘉, 蔡田海, 阮圣央. 硅中激光退火点缺陷的钝化/消除[J]. 半导体学报(英文版), 1983, 4(5): 455-463.
      Citation:
      卢励吾, 许振嘉, 蔡田海, 阮圣央. 硅中激光退火点缺陷的钝化/消除[J]. 半导体学报(英文版), 1983, 4(5): 455-463.
      shu

      • Received Date: 2015-08-20

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