Chin. J. Semicond. > 1984, Volume 5 > Issue 1 > 103-107
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电子束掺杂磷

李秀琼 , 孙慧玲 and 王培大

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1984

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      Article Navigation >  Journal of Semiconductors  > 1984  >  5(1): 103-107
      李秀琼, 孙慧玲, 王培大. 电子束掺杂磷[J]. 半导体学报(英文版), 1984, 5(1): 103-107.
      Citation:
      李秀琼, 孙慧玲, 王培大. 电子束掺杂磷[J]. 半导体学报(英文版), 1984, 5(1): 103-107.
      shu

      • Received Date: 2015-08-20

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