Chin. J. Semicond. > 1997, Volume 18 > Issue 12 > 946-950

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形成硅多层微机械结构的“掩模-无掩模”腐蚀新技术

李昕欣 , 杨恒 , 沈绍群 and 鲍敏杭

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(12): 946-950
      李昕欣, 杨恒, 沈绍群, 鲍敏杭. 形成硅多层微机械结构的“掩模-无掩模”腐蚀新技术[J]. 半导体学报(英文版), 1997, 18(12): 946-950.
      Citation:
      李昕欣, 杨恒, 沈绍群, 鲍敏杭. 形成硅多层微机械结构的“掩模-无掩模”腐蚀新技术[J]. 半导体学报(英文版), 1997, 18(12): 946-950.
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      • Received Date: 2015-08-19

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