Chin. J. Semicond. > 1984, Volume 5 > Issue 1 > 25-32
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直拉硅单晶碳沾污的研究

梁骏吾 , 黄大定 , 汪光川 , 尹恩华 and 杨雪珍

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1984

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      Article Navigation >  Journal of Semiconductors  > 1984  >  5(1): 25-32
      梁骏吾, 黄大定, 汪光川, 尹恩华, 杨雪珍. 直拉硅单晶碳沾污的研究[J]. 半导体学报(英文版), 1984, 5(1): 25-32.
      Citation:
      梁骏吾, 黄大定, 汪光川, 尹恩华, 杨雪珍. 直拉硅单晶碳沾污的研究[J]. 半导体学报(英文版), 1984, 5(1): 25-32.
      shu

      • Received Date: 2015-08-20

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