Chin. J. Semicond. > 2001, Volume 22 > Issue 3 > 383-386

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300mm硅单晶的生长技术

张果虎 , 吴志强 , 方锋 , 秦福 , 常青 , 周旗钢 and 屠海令

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Key words: 300mm, 硅单晶, 热屏, 磁场

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    Received: 20 August 2015 Revised: Online: Published: 01 March 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(3): 383-386
      张果虎, 吴志强, 方锋, 秦福, 常青, 周旗钢, 屠海令. 300mm硅单晶的生长技术[J]. 半导体学报(英文版), 2001, 22(3): 383-386.
      Citation:
      张果虎, 吴志强, 方锋, 秦福, 常青, 周旗钢, 屠海令. 300mm硅单晶的生长技术[J]. 半导体学报(英文版), 2001, 22(3): 383-386.
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      • Received Date: 2015-08-20

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