Chin. J. Semicond. > 2001, Volume 22 > Issue 8 > 1081-1086

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Key words: ULSI互连, xerogel, 热特性模拟

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    Received: 20 August 2015 Revised: Online: Published: 01 August 2001

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      阮刚, 肖夏. ULSI互连系统热特性的模拟[J]. 半导体学报(英文版), 2001, 22(8): 1081-1086.
      Citation:
      阮刚, 肖夏. ULSI互连系统热特性的模拟[J]. 半导体学报(英文版), 2001, 22(8): 1081-1086.

      • Received Date: 2015-08-20

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