Chin. J. Semicond. > 1983, Volume 4 > Issue 6 > 565-573
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用拼版法研制大规模集成电路的掩膜版

林雨

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    Received: 20 August 2015 Revised: Online: Published: 01 June 1983

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      Article Navigation >  Journal of Semiconductors  > 1983  >  4(6): 565-573
      林雨. 用拼版法研制大规模集成电路的掩膜版[J]. 半导体学报(英文版), 1983, 4(6): 565-573.
      Citation:
      林雨. 用拼版法研制大规模集成电路的掩膜版[J]. 半导体学报(英文版), 1983, 4(6): 565-573.
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      • Received Date: 2015-08-20

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