Citation: |
叶志镇. 超高真空CVD极低温低压硅外延与高分辨TEM分析研究[J]. 半导体学报(英文版), 1994, 15(12): 832-837.
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Received: 19 August 2015 Revised: Online: Published: 01 December 1994
Citation: |
叶志镇. 超高真空CVD极低温低压硅外延与高分辨TEM分析研究[J]. 半导体学报(英文版), 1994, 15(12): 832-837.
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