Chin. J. Semicond. > 1995, Volume 16 > Issue 3 > 188-194
|

CONTENTS

半导体材料与器件生产工艺尾气中砷、磷、硫的治理及检测

闻瑞梅，梁骏吾，邓礼生，彭永清

+ Author Affiliations

PDF

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2037 Times PDF downloads: 1107 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 March 1995

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 1995  >  16(3): 188-194
      闻瑞梅，梁骏吾，邓礼生，彭永清. 半导体材料与器件生产工艺尾气中砷、磷、硫的治理及检测[J]. 半导体学报(英文版), 1995, 16(3): 188-194.
      Citation:
      闻瑞梅，梁骏吾，邓礼生，彭永清. 半导体材料与器件生产工艺尾气中砷、磷、硫的治理及检测[J]. 半导体学报(英文版), 1995, 16(3): 188-194.
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return