| Citation: |
Lin Ruobing, Wei Wei, Feng Qian, Wang Chong, Hao Yue. An Air-Bridge Inter-Connection Method for Microwave and High Temperature Devices[J]. Journal of Semiconductors, 2008, 29(2): 352-355.
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Lin R B, Wei W, Feng Q, Wang C, Hao Y. An Air-Bridge Inter-Connection Method for Microwave and High Temperature Devices[J]. J. Semicond., 2008, 29(2): 352.
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An Air-Bridge Inter-Connection Method for Microwave and High Temperature Devices
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Abstract
A flexible air-bridge method is proposed that is useful for high temperature microwave devices.This method makes use of different resists to give several resists as a sacrificial layer.After low temperature baking, a perfect arch sacrificial layer of bridges with a ratio higher than 60% is obtained.An air-bridge inter-connection structure with excellent characteristics and high reliability can be easily fabricated with this method.-
Keywords:
- air-bridge,
- arch,
- sacrificial layer technology
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References
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Proportional views
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