Chin. J. Semicond. > 1984, Volume 5 > Issue 4 > 360-367
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多晶硅中碳化物及其来源的研究

万群 , 李玉珍 , 徐宝琨 and 赵慕愚

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    Received: 20 August 2015 Revised: Online: Published: 01 April 1984

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      Article Navigation >  Journal of Semiconductors  > 1984  >  5(4): 360-367
      万群, 李玉珍, 徐宝琨, 赵慕愚. 多晶硅中碳化物及其来源的研究[J]. 半导体学报(英文版), 1984, 5(4): 360-367.
      Citation:
      万群, 李玉珍, 徐宝琨, 赵慕愚. 多晶硅中碳化物及其来源的研究[J]. 半导体学报(英文版), 1984, 5(4): 360-367.
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      • Received Date: 2015-08-20

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