Chin. J. Semicond. > 2003, Volume 24 > Issue 6 > 606-611
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铝掺杂氧化锌薄膜在玻璃衬底上的RF反应共溅射低温织构生长

邵乐喜 , 张昆辉 and 黄惠良

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Key words: 铝掺杂氧化锌(ZnO∶Al)薄膜, 射频(RF)反应共溅射, 织构, 低温沉积, 未退火

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(6): 606-611
      邵乐喜, 张昆辉, 黄惠良. 铝掺杂氧化锌薄膜在玻璃衬底上的RF反应共溅射低温织构生长[J]. 半导体学报(英文版), 2003, 24(6): 606-611.
      Citation:
      邵乐喜, 张昆辉, 黄惠良. 铝掺杂氧化锌薄膜在玻璃衬底上的RF反应共溅射低温织构生长[J]. 半导体学报(英文版), 2003, 24(6): 606-611.
      shu

      • Received Date: 2015-08-20

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