Al-Si欧姆接触的连续CO_2激光辐照合金化

Abstract: 本文报道了用连续CO_2激光辐照代替热合金化做Al-Si欧姆接触.由于激光退火具有瞬时退火的特点,避免或是明显地减少导致残结器件失效的Al-Si互扩散现象,从而达到保持良好结特性的欧姆接触.为提高大规模集成电路的集成度提供了一条途径.

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