Bulk-Silicon Resonant Accelerometer

Abstract: Resonant accelerometer is designed,which includes two doubleended tuning forks,a proof mass,fourleverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes.The device is fabricated using MEMS bulk-silicon technology,whose sensitive degree is 27.3Hz/g,and the resolution is 167.8μg.


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