J. Semicond. > Volume 34 > Issue 8 > Article Number: 085006

High-Q micro-ring resonators and grating couplers for silicon-on-insulator integrated photonic circuits

Xiaogang Tong , Jun Liu , and Chenyang Xue ,

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Abstract: An ultra-small integrated photonic circuit has been proposed, which incorporates a high-quality-factor passive micro-ring resonator (MR) linked to a vertical grating coupler on a standard silicon-on-insulator (SOI) substrate. The experimental results demonstrate that the MR propagation loss is 0.532 dB/cm with a 10 μm radius ring resonator, the intrinsic quality factor is as high as 202.000, the waveguide grating wavelength response curve is a 1 dB bandwidth of 40 nm at 1540 nm telecommunication wavelengths, and the measured fiber-to-fiber coupling loss is 10 dB. Furthermore, the resonator wavelength temperature dependence of the 450 nm wide micro-ring resonator is 54.1 pm/℃. Such vertical grating coupler and low loss MR-integrated components greatly promote a key element in biosensors and high-speed interconnect communication applications.

Key words: high-quality-factorpassive micro-ring resonatorswaveguide grating couplersintegrated photonic circuit

Abstract: An ultra-small integrated photonic circuit has been proposed, which incorporates a high-quality-factor passive micro-ring resonator (MR) linked to a vertical grating coupler on a standard silicon-on-insulator (SOI) substrate. The experimental results demonstrate that the MR propagation loss is 0.532 dB/cm with a 10 μm radius ring resonator, the intrinsic quality factor is as high as 202.000, the waveguide grating wavelength response curve is a 1 dB bandwidth of 40 nm at 1540 nm telecommunication wavelengths, and the measured fiber-to-fiber coupling loss is 10 dB. Furthermore, the resonator wavelength temperature dependence of the 450 nm wide micro-ring resonator is 54.1 pm/℃. Such vertical grating coupler and low loss MR-integrated components greatly promote a key element in biosensors and high-speed interconnect communication applications.

Key words: high-quality-factorpassive micro-ring resonatorswaveguide grating couplersintegrated photonic circuit



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Luo L W, Wiederhecker G S, Cardenas J. High quality factor etchless silicon photonic ring resonators[J]. Opt Express, 2011, 19: 6284. doi: 10.1364/OE.19.006284

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Rabiei P, Steier W H, Zhang C. Polymer micro-ring filters and modulators[J]. J Lightwave Technol, 2002, 20: 1968. doi: 10.1109/JLT.2002.803058

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[1]

Zimmermann L, Tekin T, Schroeder H. How to bring nanophotonics to application-silicon photonics packaging[J]. LEOS Newsletter, 2008, 22: 4.

[2]

Xu Q, Manipatruni S, Schmidt B. 12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators[J]. Opt Express, 2007, 15: 430. doi: 10.1364/OE.15.000430

[3]

Wu Zhigang, Zhang Weigang, Wang Zhi. Fabrication and evaluation of Bragg gratings on optimally designed silicon-on-insulator rib waveguides using electron-beam lithography[J]. Chinese Journal of Semiconductors, 2006, 27(8): 1347.

[4]

Li Shuai, Wu Yuanda, Yin Xiaojie. Tunable filters based on an SOI nano-wire waveguide micro ring resonator[J]. Journal of Semiconductors, 2011, 32(8): 084007. doi: 10.1088/1674-4926/32/8/084007

[5]

Ren G H, Cheng S W, Cheng Y P. Study on inverse taper based mode transformer for low loss coupling between silicon wire waveguide and lensed fiber[J]. Opt Commun, 2011, 284: 4782. doi: 10.1016/j.optcom.2011.05.072

[6]

Manolatou C, Lipson M. All-optical silicon modulators based on carrier injection by two-photon absorption[J]. J Lightwave Technol, 2006, 24: 1433. doi: 10.1109/JLT.2005.863326

[7]

Po D, Preble S F, Lipson M. All-optical compact silicon comb switch[J]. Opt Express, 2007, 15: 9600. doi: 10.1364/OE.15.009600

[8]

Little B E, Chu S T, Haus H A. Microring resonator channel dropping filters[J]. J Lightwave Technol, 1997, 15: 998. doi: 10.1109/50.588673

[9]

Xu D X, Densmore A, Delâge A. Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding[J]. Opt Express, 2008, 16: 15137. doi: 10.1364/OE.16.015137

[10]

Xia F N, Sekaric L, Vlasov Y. Ultracompact optical buffers on a silicon chip[J]. Nat Photonics, 2007, 1: 65. doi: 10.1038/nphoton.2006.42

[11]

Xu Q F, Dong P, Lipson M. Breaking the delay-bandwidth limit in a photonic structure[J]. Nat Phys, 2007, 3: 406. doi: 10.1038/nphys600

[12]

Xiao S, Khan M H, Shen H. Modeling and measurement of losses in silicon-on-insulator resonators and bends[J]. Opt Express, 2007, 15: 10553. doi: 10.1364/OE.15.010553

[13]

Liu S W, Xiao M. Electro-optic switch in ferroelectric thin films mediated by surface plasmons[J]. Appl Phys Lett, 2006, 88: 14.

[14]

Luo L W, Wiederhecker G S, Cardenas J. High quality factor etchless silicon photonic ring resonators[J]. Opt Express, 2011, 19: 6284. doi: 10.1364/OE.19.006284

[15]

Rabiei P, Steier W H, Zhang C. Polymer micro-ring filters and modulators[J]. J Lightwave Technol, 2002, 20: 1968. doi: 10.1109/JLT.2002.803058

[16]

Kokubun Y, Yoneda S, Matsuura S. Temperature-independent optical filter at 1.55-μm wavelength using a silica-based thermal waveguide[J]. Electron Lett, 1998, 34: 367. doi: 10.1049/el:19980245

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X G Tong, J Liu, C Y Xue. High-Q micro-ring resonators and grating couplers for silicon-on-insulator integrated photonic circuits[J]. J. Semicond., 2013, 34(8): 085006. doi: 10.1088/1674-4926/34/8/085006.

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Manuscript received: 29 September 2012 Manuscript revised: 05 March 2013 Online: Published: 01 August 2013

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