Chin. J. Semicond. > Volume 4 > Issue 2 > Article Number: 154

GaAs三元异质外延层厚度测量的X射线衍射比强度法

杨传铮

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Abstract: 基于对称Bragg反射几何、动力学衍射强度和运动学吸收效应,推导了多层外延系统各层厚度与衍射强度比的方程组.比强度由实验测出,于是可测各外延层的厚度.实验结果表明,上述处理对多层近完整晶体是适用的.最后,还简要讨论了影响厚度测量的诸因素,指出探测器和记录系统的线性可靠性及衍射峰的分离尤为重要.

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History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 February 1983

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