Chin. J. Semicond. > Volume 4 > Issue 2 > Article Number: 149

用硅烷和乙烯辉光放电法制备的a-Si_xC_(1-x):H薄膜及光电性能的研究

陈光华 , 张仿清 , 杜宁 , 徐希翔 , 黄士生 and 刘智

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Abstract: 本文主要介绍应用辉光放电法制备的,光电性能优良的 a-S1_xC_1 x: H 薄膜的最佳工艺条件、红外吸收光谱、光学带隙E_(opt)同x的关系、ESCA和ESR的测量结果,井对这些实验结果进行了初步讨论.

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History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 February 1983

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