Chin. J. Semicond. > 1997, Volume 18 > Issue 9 > 718-720

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n型6H-SiC体材料欧姆接触的制备

张玉明 , 罗晋生 and 张义门

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(9): 718-720
      张玉明, 罗晋生, 张义门. n型6H-SiC体材料欧姆接触的制备[J]. 半导体学报(英文版), 1997, 18(9): 718-720.
      Citation:
      张玉明, 罗晋生, 张义门. n型6H-SiC体材料欧姆接触的制备[J]. 半导体学报(英文版), 1997, 18(9): 718-720.
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      • Received Date: 2015-08-19

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