Chin. J. Semicond. > Volume 18 > Issue 1 > Article Number: 64

用气相色谱法测定半导体工艺中固、液、气相砷、磷及化合物的新方法

闻瑞梅

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Abstract: 本文研究了一种快速、灵敏、可靠的高温氢还原—气相色谱分析方法,样品不需预处理,使气相色谱仪能直接测定固、液、气相样品中砷、磷及其化合物的含量.砷、磷的检测限分别为0.01mg/L和0.003mg/L.相对偏差分别为6.2%和8.6%,测定范围为10-5~10-11.并与经典方法进行对比,结果一致.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 January 1997

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