Chin. J. Semicond. > Volume 18 > Issue 11 > Article Number: 840

使用金刚石膜热沉的半导体激光器特性研究

顾长志 , 金曾孙 , 吕宪义 , 邹广田 , 屠玉珍 and 方祖捷

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Abstract: 比较了使用金刚石膜热沉和传统的钢热沉的半导体激光二极管列阵在热阻和光输出功率方面的特性.与使用Cu热沉的器件相比,采用厚度为350~400μm,热导率在12~14W/(K·cm)的金刚石膜作为热沉的H极管列阵可使热阻降低45~50%,同值电流明显降低,而光输出功率提高25%,稳定性得到改善.表现出金刚石膜热沉在半导体器件散热方面的明显优势.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 November 1997

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