Chin. J. Semicond. > Volume 18 > Issue 11 > Article Number: 867

用于GaN生长的蓝宝石衬底化学抛光研究

王晓晖 , 刘祥林 , 江度 and 陆大成

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Abstract: 蓝宝石是生长GaN材料最常用的衬底,本文研究了H2SO4和H3PO4的混合酸液的温度、混合酸的比例以及腐蚀时间对蓝宝石腐蚀速率的影响.发现在H2SO4:H3PO4=3:1的溶液中的腐蚀速率是由表面化学反应速率所控制.利用X射线双晶衍射对除去蓝宝石表面的机械损伤层情况进行了测量.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 November 1997

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