Chin. J. Semicond. > Volume 18 > Issue 2 > Article Number: 156

多元素测试仪测定二氯硅烷中的痕量磷

闻瑞梅 , 周淑君 , 袁越 and 赵振环

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Abstract: 二氯硅烷的沸点只有8.3℃,常温下呈气体状态,用常规的方法取样和检测难度很大.我们用高温富氢还原的方法,使二氯硅烷中的磷还原为PH3,用气相色谱法测定.并在炉口设计了锥形惰性气氛保护炉口装置,有效的防止了氢爆.保证测试安全并能连续进样、操作简便、省时.同时利用NaOH富集,解决了主体干扰杂质的问题.方法灵敏、可靠、简便、灵敏度由0.1μg/1提高到0.0μg/1.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 February 1997

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