Chin. J. Semicond. > Volume 13 > Issue 10 > Article Number: 589

GaAs(100)衬底上金属有机物化学汽相淀积法生长的CdTe膜喇曼光谱研究

劳浦东 , 过毅乐 , 张晓峰 , 姚文华 , 徐飞 and 丁永庆

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Abstract: 本文报道了GaAs(100)衬底上CdTe外延膜的喇曼光谱,并提出利用实验上测得的CdTe外延膜LO声子峰宽度和位置来确定外延膜应变的处理方法.结果表明,对于厚度达2.5 μm的 CdTe外延膜,仍有应变存在,且应变大小与样品生长条件有关.从喇曼谱的分析中还提取了样品质量的有用信息其质量分析结果得到X射线双晶衍射和扫描电子显微镜表面形貌分析结果的支持.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 October 1992

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