Chin. J. Semicond. > Volume 18 > Issue 7 > Article Number: 523

硅光探测器紫外响应的改善

尹长松 and 朱晓刚

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Abstract: 利用透过二氧化硅层进行杂质扩散的方法,获得低表面浓度浅结深并具有漂移自建场的掺杂层,制作最佳厚度的光透射膜,使硅光敏二极管的紫外响应获得改善,得到在254nm波长下响应度达0.18A/W的结果.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 July 1997

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