Chin. J. Semicond. > 1983, Volume 4 > Issue 6 > 590-592
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a-Si:(H,Cl)薄膜的XPS和UPS研究

邢益荣 , 钟战天 , 沈光地 , 孔光临 , 廖显伯 and 杨喜荣

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    Received: 20 August 2015 Revised: Online: Published: 01 June 1983

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      Article Navigation >  Journal of Semiconductors  > 1983  >  4(6): 590-592
      邢益荣, 钟战天, 沈光地, 孔光临, 廖显伯, 杨喜荣. a-Si:(H,Cl)薄膜的XPS和UPS研究[J]. 半导体学报(英文版), 1983, 4(6): 590-592.
      Citation:
      邢益荣, 钟战天, 沈光地, 孔光临, 廖显伯, 杨喜荣. a-Si:(H,Cl)薄膜的XPS和UPS研究[J]. 半导体学报(英文版), 1983, 4(6): 590-592.
      shu

      • Received Date: 2015-08-20

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