Chin. J. Semicond. > Volume 19 > Issue 8 > Article Number: 561

分子束外延系统中生长Si/SiO_2超晶格及其发光

林峰 , 盛篪 , 龚大卫 and 刘晓晗

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Abstract: 在硅分子束外延(MBE)系统中,利用Si和O2共淀积的方法生长出化学配比理想的SiO2,在此基础上生长了Si/SiO2超晶格并观察到其光致发光(PL)谱

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History

Manuscript received: 18 August 2015 Manuscript revised: Online: Published: 01 August 1998

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