Chin. J. Semicond. > Volume 4 > Issue 6 > Article Number: 565

用拼版法研制大规模集成电路的掩膜版

林雨

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Abstract: 本文讨论一种能立足于中小规模集成电路制版设备、通过设计与制版的密切配合以制备大规模集成电路掩膜版的方法——拼版法.简介了用拼版法设计大规模集成电路掩膜版的程序、拼版制版的工序及研制的结果.着重分析用拼版法制版为什么能够提高原设备可制成集成电路掩膜版的规模的道理及拼图设计的原则,以说明此方法应用的前景.

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History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 June 1983

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