| Citation: |
Chen Huimin, Guo Fuqiang, Zhang Baohua. Properties of CdTe nanocrystalline thin films grown on different substrates by low temperature sputtering[J]. Journal of Semiconductors, 2009, 30(5): 053001. doi: 10.1088/1674-4926/30/5/053001
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Chen H M, Guo F Q, Zhang B H. Properties of CdTe nanocrystalline thin films grown on different substrates by low temperature sputtering[J]. J. Semicond., 2009, 30(5): 053001. doi: 10.1088/1674-4926/30/5/053001.
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Properties of CdTe nanocrystalline thin films grown on different substrates by low temperature sputtering
DOI: 10.1088/1674-4926/30/5/053001
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Abstract
CdTe nanocrystalline thin films have been prepared on glass, Si and Al2O3 substrates by radio-frequency magnetron sputtering at liquid nitrogen temperature. The crystal structure and morphology of the films were charac-terized by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FESEM). The XRD examina-tions revealed that CdTe films on glass and Si had a better crystal quality and higher preferential orientation along the (111) plane than the Al2O3. FESEM observations revealed a continuous and dense morphology of CdTe films on glass and Si substrates. Optical properties of nanocrystalline CdTe films deposited on glass substrates for different deposited times were studied.-
Keywords:
- CdTe
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References
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Proportional views
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