A low-loss V-groove coplanar waveguide on an SOI substrate

Zhao Yuhang; Tong Jiarong; Zeng Xuan; Wang Yong

doi:10.1088/1674-4926/30/7/074004

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Zhao Yuhang, Tong Jiarong, Zeng Xuan, Wang Yong. A low-loss V-groove coplanar waveguide on an SOI substrate[J]. Journal of Semiconductors, 2009, 30(7): 074004. doi: 10.1088/1674-4926/30/7/074004 ****Zhao Y H, Tong J R, Zeng X, Wang Y. A low-loss V-groove coplanar waveguide on an SOI substrate[J]. J. Semicond., 2009, 30(7): 074004. doi: 10.1088/1674-4926/30/7/074004.

Citation:

Zhao Yuhang, Tong Jiarong, Zeng Xuan, Wang Yong. A low-loss V-groove coplanar waveguide on an SOI substrate[J]. Journal of Semiconductors, 2009, 30(7): 074004. doi: 10.1088/1674-4926/30/7/074004 ****

Zhao Y H, Tong J R, Zeng X, Wang Y. A low-loss V-groove coplanar waveguide on an SOI substrate[J]. J. Semicond., 2009, 30(7): 074004. doi: 10.1088/1674-4926/30/7/074004.

Citation:

Zhao Y H, Tong J R, Zeng X, Wang Y. A low-loss V-groove coplanar waveguide on an SOI substrate[J]. J. Semicond., 2009, 30(7): 074004. doi: 10.1088/1674-4926/30/7/074004.

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A low-loss V-groove coplanar waveguide on an SOI substrate

DOI: 10.1088/1674-4926/30/7/074004

State Key Laboratory of ASIC & System, Microelectronics Department, Fudan University, Shanghai 201203, China
State Key Laboratory of ASIC & System, Microelectronics Department, Fudan University, Shanghai 201203, China
State Key Laboratory of ASIC & System, Microelectronics Department, Fudan University, Shanghai 201203, China
Shanghai IC Research and Development Center, Shanghai 201203, China

Received Date: 2015-08-18
Accepted Date: 2009-01-16
Revised Date: 2009-02-26
Published Date: 2009-07-10

Abstract

Abstract

A novel low-loss 50-Ω coplanar waveguide with V-groove on an SOI substrate is proposed. Through a CMOS-compatible process and anisotropic etching of silicon, surface silicon is removed from the SOI. The measured results show that the V-groove coplanar waveguide causes about 50% less loss than the conventional one at a high frequency of up to 40 GHz.
- SOI

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A low-loss V-groove coplanar waveguide on an SOI substrate

DOI: 10.1088/1674-4926/30/7/074004

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A low-loss V-groove coplanar waveguide on an SOI substrate

DOI: 10.1088/1674-4926/30/7/074004

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