Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Qin Zhengkun; He Fei; Liu Chunling; Wang Lizhong; Ma Chunsheng

doi:10.1088/1674-4926/31/7/074004

J. Semicond. > 2010, Volume 31 > Issue 7 > 074004

SEMICONDUCTOR DEVICES

Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Qin Zhengkun, He Fei, Liu Chunling, Wang Lizhong and Ma Chunsheng

+ Author Affiliations

DOI: 10.1088/1674-4926/31/7/074004

Abstract: Arrayed waveguide grating (AWG) is a key device in the wavelength-division multiplexing (WDM) system, and the flat spectral response of the AWG device is required. In this paper, the RIE process has been improved. By using the steam-redissolution technique, the insertion loss and the crosstalk have been reduced. Experimental results show that the central wavelength is 1550.86 nm, the channel spectral response flatness is about 1.5 dB, 3-dB bandwidth is about 0.478 nm, insertion loss is 10.5 dB, and crosstalk is about -22 dB. The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels, and the crosstalk is reduced by 2.5 dB after the steam-redissolution.

Key words: arrayed waveguide grating, flat spectral response, steam-redissolution, 3-dB bandwidth, crosstalk

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Qin Zhengkun, He Fei, Liu Chunling, Wang Lizhong, Ma Chunsheng. Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique[J]. Journal of Semiconductors, 2010, 31(7): 074004. doi: 10.1088/1674-4926/31/7/074004

Qin Z K, He F, Liu C L, Wang L Z, Ma C S. Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique[J]. J. Semicond., 2010, 31(7): 074004. doi: 10.1088/1674-4926/31/7/074004.

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Received: 18 August 2015 Revised: 25 February 2010 Online: Published: 01 July 2010

Arrayed waveguide grating (AWG) is a key device in the wavelength-division multiplexing (WDM) system, and the flat spectral response of the AWG device is required. In this paper, the RIE process has been improved. By using the steam-redissolution technique, the insertion loss and the crosstalk have been reduced. Experimental results show that the central wavelength is 1550.86 nm, the channel spectral response flatness is about 1.5 dB, 3-dB bandwidth is about 0.478 nm, insertion loss is 10.5 dB, and crosstalk is about -22 dB. The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels, and the crosstalk is reduced by 2.5 dB after the steam-redissolution.

Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

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Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

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