Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Qin Zhengkun; He Fei; Liu Chunling; Wang Lizhong; Ma Chunsheng

doi:10.1088/1674-4926/31/7/074004

J. Semicond. > 2010, Volume 31 > Issue 7 > 074004

SEMICONDUCTOR DEVICES

Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Qin Zhengkun, He Fei, Liu Chunling, Wang Lizhong and Ma Chunsheng

+ Author Affiliations

DOI: 10.1088/1674-4926/31/7/074004

Abstract: Arrayed waveguide grating (AWG) is a key device in the wavelength-division multiplexing (WDM) system, and the flat spectral response of the AWG device is required. In this paper, the RIE process has been improved. By using the steam-redissolution technique, the insertion loss and the crosstalk have been reduced. Experimental results show that the central wavelength is 1550.86 nm, the channel spectral response flatness is about 1.5 dB, 3-dB bandwidth is about 0.478 nm, insertion loss is 10.5 dB, and crosstalk is about -22 dB. The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels, and the crosstalk is reduced by 2.5 dB after the steam-redissolution.

Key words: arrayed waveguide grating, flat spectral response, steam-redissolution, 3-dB bandwidth, crosstalk

1	Calculation of the carrier dynamics and impedance spectroscopy model in quantum well infrared photodetectors Chenzhe Hu, Yuyu Bu, Xianying Dai, Fengqiu Jiang, Yue Hao, et al. Journal of Semiconductors, 2025, 46(3): 032403. doi: 10.1088/1674-4926/24090033
2	A peak enhancement of frequency response of waveguide integrated silicon-based germanium avalanche photodetector Linkai Yi, Daoqun Liu, Wenzheng Cheng, Daimo Li, Guoqi Zhou, et al. Journal of Semiconductors, 2024, 45(7): 072401. doi: 10.1088/1674-4926/24020006
3	Novel through-silicon vias for enhanced signal integrity in 3D integrated systems Runiu Fang, Xin Sun, Min Miao, Yufeng Jin Journal of Semiconductors, 2016, 37(10): 106002. doi: 10.1088/1674-4926/37/10/106002
4	FDTD technique based crosstalk analysis of bundled SWCNT interconnects Yograj Singh Duksh, Brajesh Kumar Kaushik, Rajendra P. Agarwal Journal of Semiconductors, 2015, 36(5): 055002. doi: 10.1088/1674-4926/36/5/055002
5	A voltage regulator system with dynamic bandwidth boosting for passive UHF RFID transponders Jinpeng Shen, Xin'an Wang, Shan Liu, Shoucheng Li, Zhengkun Ruan, et al. Journal of Semiconductors, 2013, 34(10): 105004. doi: 10.1088/1674-4926/34/10/105004
6	Analysis of fabrication results for 17×17 polymer arrayed waveguide grating multiplexers with flat spectral responses Zhengkun Qin, Yue Yu, Jia Song, Huiping Zhang, Guofeng Wang, et al. Journal of Semiconductors, 2013, 34(9): 094011. doi: 10.1088/1674-4926/34/9/094011
7	Determination of channel temperature for AlGaN/GaN HEMTs by high spectral resolution micro-Raman spectroscopy Zhang Guangchen, Feng Shiwei, Li Jingwan, Zhao Yan, Guo Chunsheng, et al. Journal of Semiconductors, 2012, 33(4): 044003. doi: 10.1088/1674-4926/33/4/044003
8	A simulation of doping and trap effects on the spectral response of AlGaN ultraviolet detectors Sidi Ould Saad Hamady Journal of Semiconductors, 2012, 33(3): 034002. doi: 10.1088/1674-4926/33/3/034002
9	16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides Zhao Lei, An Junming, Zhang Jiashun, Song Shijiao, Wu Yuanda, et al. Journal of Semiconductors, 2011, 32(2): 024010. doi: 10.1088/1674-4926/32/2/024010
10	Characterisation of the optical properties of InGaN MQW structures using a combined SEM and CL spectral mapping system Mark N. Lockrey, Matthew R. Phillips Journal of Semiconductors, 2011, 32(1): 012001. doi: 10.1088/1674-4926/32/1/012001
11	A novel fabrication approach for an athermal arrayed-waveguide grating Zhou Tianhong, Ma Weidong Journal of Semiconductors, 2010, 31(1): 014005. doi: 10.1088/1674-4926/31/1/014005
12	Frequency of the transition spectral line of an electron in quantum rods Wang Guiwen, Xiao Jinglin Journal of Semiconductors, 2010, 31(9): 092002. doi: 10.1088/1674-4926/31/9/092002
13	Crosstalk of HgCdTe LWIR n-on-p diode arrays Sun Yinghui, Zhang Bo, Yu Meifang, Liao Qingjun, Zhang Yan, et al. Journal of Semiconductors, 2009, 30(9): 094007. doi: 10.1088/1674-4926/30/9/094007
14	Fabrication of a 17×17 Polymer Arrayed Waveguide Gratingwith Flat Spectral Response Qin Zhengkun, Ma Chunsheng Journal of Semiconductors, 2008, 29(9): 1804-1807.
15	Polymer Arrayed Waveguide Grating with Box-Like Spectral Response Qin Zhengkun, Ma Chunsheng Journal of Semiconductors, 2008, 29(12): 2307-2310.
16	A Novel Triplexer Design Based on Arrayed Waveguide Grating Lang Tingting, He Jianjun, He Sailing Chinese Journal of Semiconductors , 2006, 27(2): 368-372.
17	Fabrication and Evaluation of Bragg Gratings on Optimally Designed Silicon-on-Insulator Rib Waveguides Using Electron-Beam Lithography Wu Zhigang, Zhang Weigang, Wang Zhi, Kai Guiyun, Yuan Shuzhong, et al. Chinese Journal of Semiconductors , 2006, 27(8): 1347-1350.
18	Effect of DBR Geometry on Reflectivity and Spectral Linewidth of DBR Lasers Fang Dawei, Zhang Yi, Li Chenxia, Manzaneda C, Li Bo, et al. Chinese Journal of Semiconductors , 2005, 26(12): 2315-2319.
19	Design, Fabrication, and Testing of Single-Side Alignment of 16×0.8nm Arrayed Waveguide Grating Li Jian, An Junming, Wang Hongjie, Xia Junlei, Hu Xiongwei, et al. Chinese Journal of Semiconductors , 2005, 26(2): 254-257.
20	Numerical Analysis for Phase Error of Silica-Based Arrayed Waveguide Grating An Junming, Xia Junzhi, Li Jian, Gao Dingshan, Li Jianguang, et al. Chinese Journal of Semiconductors , 2005, 26(S1): 220-224.

Search

GET CITATION

Qin Zhengkun, He Fei, Liu Chunling, Wang Lizhong, Ma Chunsheng. Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique[J]. Journal of Semiconductors, 2010, 31(7): 074004. doi: 10.1088/1674-4926/31/7/074004

Qin Z K, He F, Liu C L, Wang L Z, Ma C S. Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique[J]. J. Semicond., 2010, 31(7): 074004. doi: 10.1088/1674-4926/31/7/074004.

Export: BibTex EndNote

Article Metrics

Article views: 3834 Times PDF downloads: 1613 Times Cited by: 0 Times

History

Received: 18 August 2015 Revised: 25 February 2010 Online: Published: 01 July 2010

Arrayed waveguide grating (AWG) is a key device in the wavelength-division multiplexing (WDM) system, and the flat spectral response of the AWG device is required. In this paper, the RIE process has been improved. By using the steam-redissolution technique, the insertion loss and the crosstalk have been reduced. Experimental results show that the central wavelength is 1550.86 nm, the channel spectral response flatness is about 1.5 dB, 3-dB bandwidth is about 0.478 nm, insertion loss is 10.5 dB, and crosstalk is about -22 dB. The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels, and the crosstalk is reduced by 2.5 dB after the steam-redissolution.

Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Search

GET CITATION

Share:

Article Metrics

History

Catalog

Email This Article

Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

DOI: 10.1088/1674-4926/31/7/074004

Abstract

References

Proportional views

Catalog

Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Search

GET CITATION

Share:

Article Metrics

History

Catalog

Email This Article

Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

DOI: 10.1088/1674-4926/31/7/074004

Abstract

References

Proportional views

Catalog

Export File

Citation

Format

Content