J. Semicond. > 2013, Volume 34 > Issue 11 > 114015
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SEMICONDUCTOR DEVICES

Design of a Bionic Cilia MEMS three-dimensional vibration sensor

Zhen Li1, 2, , Guojun Zhang1, 2, Chenyang Xue1, 2 and Shujuan Wu1, 2

+ Author Affiliations

 Corresponding author: Li Zhen, 457768339@qq.com

DOI: 10.1088/1674-4926/34/11/114015

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Abstract: A biomimetic three-dimensional piezoresistive vibration sensor based on MEMS technology is reported. The mechanical properties of the sensor are analyzed and the static and dynamic characteristics of the sensor are simulated by ANSYS Workbench12.0. The structure was made by MEMS processes including lithography, ion implantation, PECVD, etching, etc. Finally, the sensor is tested by using a TV5220 sensor auto calibration system. The results show that the lowest sensitivity of the sensor is 394.7 μ V/g and can reach up to 460.2 μ V/g, and the dimension coupling is less than 0.6152%, and the working frequency range is 0-1000 Hz.

Key words: vibration sensor, MEMS, bionic, ANSYS



[1]
Tang Yiping, He Wujie, Zhu Yihua. Design of intelligent omn-i directional vibration sensor. Chinese Journal of Sensors and Actuators, 2007, 20(8):1767
[2]
Xiong Shuidong, Luo Hong, Hu Yongming. Research on interferometric polarization maintaining fiber optic micro-vibration vector sensor. Chinese Journal of Lasers, 2004, 31(7):843 http://en.cnki.com.cn/Article_en/CJFDTOTAL-JJZZ200407017.htm
[3]
Li Z N, Tang J, Li Q S. Optimal sensor locations for structural vibration measurements. Appl Acoustics, 2004, 65:807 doi: 10.1016/j.apacoust.2003.12.007
[4]
Peiner E, Scholz D, Schlachetzki A, et al. A micromachined vibration sensor based on the control of power transmitted between optical fibres. Sensors and Actuators, 1998, 65:23 doi: 10.1016/S0924-4247(97)01643-9
[5]
Kimura M, Toshima K. Vibration sensor using optical-fiber cantilever with bulb-lens. Sensors and Actuators, 1998, 66:178 doi: 10.1016/S0924-4247(98)00005-3
[6]
Dangles O, Magal C, Pierre D, et al. Casa. Variation in morphology and performance of predator-sensing system in cricket populations. Journal of Experimental Biology, 2005, 208:462
[7]
Barth F G, Holler A. Dynamics of arthropod filiform hairs. v the response of spider trichobothria to natural stimuli. Philosophical Transactions of the Royal Society B:Biological Sciences, 1999, 354(1380):183 doi: 10.1098/rstb.1999.0370
[8]
Dangles O, Casas J, Coolen I. Textbook cricket goes to the field:the ecological scene of the neuroethological play. Journal of Experimental Biology, 2006, 209:393 doi: 10.1242/jeb.02000
[9]
Barth F G. Spider mechanoreceptors. Current Opinion in Neurobiology, 2004, 14:415 doi: 10.1016/j.conb.2004.07.005
[10]
Amarasinghe R, Dao D V, Toriyama T, et al. Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer. J Micromechan Microeng, 2005, 15:1745 doi: 10.1088/0960-1317/15/9/017
[11]
Gad-el-Hak M. MEMS design and fabrication. Beijing:China Machine Press, 2010
Fig. 1.  Ciliary structure and SEM image.

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Fig. 2.  Schematic of the sensor structure.

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Fig. 3.  Structural parameter diagram of the sensor.

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Fig. 4.  Stress analysis diagram of a cross-beam with vertical cilia.

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Fig. 5.  Stress analysis diagram of horizontal cilia.

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Fig. 6.  Simulation results of the cross-beam with a rigid cylinder. (a) Relationship between maximum stress and beam thickness with the height of a rigid cylinder. (b) Relationship between natural frequency and beam thickness with the height of a rigid cylinder.

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Fig. 7.  Simulation results of a silicon cantilever. (a) Relationship between maximum stress and beam thickness with beam length. (b) Relationship between natural frequency and beam thickness with beam length.

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Fig. 8.  Curve of stress distribution on the beam.

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Fig. 9.  Stress distribution of the structure.

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Fig. 10.  Piezoresistor structure.

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Fig. 11.  $y$ direction stress-contour.

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Fig. 12.  $z$ direction stress-contour.

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Fig. 13.  Harmonic response curve on $y$ direction.

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Fig. 14.  Harmonic response curve on $z$ direction.

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Fig. 15.  The manufacturing process. (a) Prepare wafer and oxidation, (b) ICP etching and boron ion implantation, (c) reoxidation and ICP etching, (d) PECVD epitaxy and ICP etching and boron ion implantation, (e) sputtering gold, (f) corroding the back cavity and releasing the structure.

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Fig. 16.  Diagram of the structure.

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Fig. 17.  $y$ direction frequency response.

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Fig. 18.  $z$ direction frequency response.

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Table 1.   Parameters of the sensor structure.

Table 2.   Material properties.

Table 3.   Sensitivity and dimension coupling (voltage $V_{\rm in}$ $=$ 10 V).
[1]
Tang Yiping, He Wujie, Zhu Yihua. Design of intelligent omn-i directional vibration sensor. Chinese Journal of Sensors and Actuators, 2007, 20(8):1767
[2]
Xiong Shuidong, Luo Hong, Hu Yongming. Research on interferometric polarization maintaining fiber optic micro-vibration vector sensor. Chinese Journal of Lasers, 2004, 31(7):843 http://en.cnki.com.cn/Article_en/CJFDTOTAL-JJZZ200407017.htm
[3]
Li Z N, Tang J, Li Q S. Optimal sensor locations for structural vibration measurements. Appl Acoustics, 2004, 65:807 doi: 10.1016/j.apacoust.2003.12.007
[4]
Peiner E, Scholz D, Schlachetzki A, et al. A micromachined vibration sensor based on the control of power transmitted between optical fibres. Sensors and Actuators, 1998, 65:23 doi: 10.1016/S0924-4247(97)01643-9
[5]
Kimura M, Toshima K. Vibration sensor using optical-fiber cantilever with bulb-lens. Sensors and Actuators, 1998, 66:178 doi: 10.1016/S0924-4247(98)00005-3
[6]
Dangles O, Magal C, Pierre D, et al. Casa. Variation in morphology and performance of predator-sensing system in cricket populations. Journal of Experimental Biology, 2005, 208:462
[7]
Barth F G, Holler A. Dynamics of arthropod filiform hairs. v the response of spider trichobothria to natural stimuli. Philosophical Transactions of the Royal Society B:Biological Sciences, 1999, 354(1380):183 doi: 10.1098/rstb.1999.0370
[8]
Dangles O, Casas J, Coolen I. Textbook cricket goes to the field:the ecological scene of the neuroethological play. Journal of Experimental Biology, 2006, 209:393 doi: 10.1242/jeb.02000
[9]
Barth F G. Spider mechanoreceptors. Current Opinion in Neurobiology, 2004, 14:415 doi: 10.1016/j.conb.2004.07.005
[10]
Amarasinghe R, Dao D V, Toriyama T, et al. Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer. J Micromechan Microeng, 2005, 15:1745 doi: 10.1088/0960-1317/15/9/017
[11]
Gad-el-Hak M. MEMS design and fabrication. Beijing:China Machine Press, 2010

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    Received: 29 March 2013 Revised: 27 June 2013 Online: Published: 01 November 2013

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      Article Navigation >  Journal of Semiconductors  > 2013  >  34(11): 114015
      Zhen Li, Guojun Zhang, Chenyang Xue, Shujuan Wu. Design of a Bionic Cilia MEMS three-dimensional vibration sensor[J]. Journal of Semiconductors, 2013, 34(11): 114015. doi: 10.1088/1674-4926/34/11/114015 ****Z Li, G J Zhang, C Y Xue, S J Wu. Design of a Bionic Cilia MEMS three-dimensional vibration sensor[J]. J. Semicond., 2013, 34(11): 114015. doi: 10.1088/1674-4926/34/11/114015.
      Citation:
      Zhen Li, Guojun Zhang, Chenyang Xue, Shujuan Wu. Design of a Bionic Cilia MEMS three-dimensional vibration sensor[J]. Journal of Semiconductors, 2013, 34(11): 114015. doi: 10.1088/1674-4926/34/11/114015 ****
      Z Li, G J Zhang, C Y Xue, S J Wu. Design of a Bionic Cilia MEMS three-dimensional vibration sensor[J]. J. Semicond., 2013, 34(11): 114015. doi: 10.1088/1674-4926/34/11/114015.
      shu

      Design of a Bionic Cilia MEMS three-dimensional vibration sensor

      DOI: 10.1088/1674-4926/34/11/114015
      • 1.

        Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, Taiyuan 030051, China

      • 2.

        Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China

      Funds:

      Project supported by the National High Technology Research and Development Program of China (No. 2011AA040404), the Young Scientists Fund of the National Natural Science Foundation of China (No. 51205374), and the Special Funds of the National Natural Science Foundation of China (No. 61127008)

      the Special Funds of the National Natural Science Foundation of China 61127008

      the Young Scientists Fund of the National Natural Science Foundation of China 51205374

      the National High Technology Research and Development Program of China 2011AA040404

      More Information
      • Corresponding author: Li Zhen, 457768339@qq.com
      • Received Date: 2013-03-29
      • Revised Date: 2013-06-27
      • Published Date: 2013-11-01

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