J. Semicond. > 2018, Volume 39 > Issue 3 > 034001

SEMICONDUCTOR DEVICES

Room temperature continuous wave operation of quantum cascade laser at λ ~ 9.4 μm

Chuncai Hou1, 2, 3, Yue Zhao1, 2, 3, Jinchuan Zhang1, 2, 3, , Shenqiang Zhai1, 2, 3, Ning Zhuo1, 2, 3, Junqi Liu1, 2, 3, Lijun Wang1, 2, 3, Shuman Liu1, 2, 3, Fengqi Liu1, 2, 3, and Zhanguo Wang1, 2, 3

+ Author Affiliations

 Corresponding author: Jinchuan Zhang, zhangjinchuan@semi.ac.cn; Fengqi Liu, fqliu@semi.ac.cn

DOI: 10.1088/1674-4926/39/3/034001

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Abstract: Continuous wave (CW) operation of long wave infrared (LWIR) quantum cascade lasers (QCLs) is achieved up to a temperature of 303 K. For room temperature CW operation, the wafer with 35 stages was processed into buried heterostructure lasers. For a 2-mm-long and 10-μm-wide laser with high-reflectivity (HR) coating on the rear facet, CW output power of 45 mW at 283 K and 9 mW at 303 K is obtained. The lasing wavelength is around 9.4 μm locating in the LWIR spectrum range.

Key words: quantum cascade laserlong wave infrareddouble-phonon resonance

Star nonfullerene acceptors like ITIC[1], IDIC[2], O-IDTBR[3], IT-4F[4], COi8DFIC[5], Y6[6] etc. continuously emerge and keep pushing the power conversion efficiency (PCE) of organic solar cells forward. These small molecules generally show narrow bandgaps, excellent visible to NIR light-harvesting capability, good electron mobility, suitable energy levels and miscibility with the donor materials. PCEs up to 18.56% have been achieved for the state-of-the-art nonfullerene organic solar cells[7]. On the other hand, donor materials matching nonfullerene acceptors also received considerable interests[8]. Owing to complementary light absorption, high hole-mobility and deep HOMO levels, wide-bandgap (WBG) conjugated copolymers are ideal donor partners for the low-bandgap nonfullerene acceptors. Hou et al. developed a WBG copolymer donor PM6 based on a benzo[1,2-c:4,5-c']dithiophene-4,8-dione (BDD) unit[9]. PM6 has been widely applied in nonfullerene solar cells, delivering high PCEs up to 17.8%[10]. Li et al. reported a simple-structured WBG copolymer PTQ10 based on a quinoxaline unit[11]. Solar cells based on PTQ10 and Y6 gave a PCE of 16.53%[12]. Huang et al. developed a WBG copolymer P2F-EHp by using an imide-functionalized benzotrizole (TzBI) unit[13]. P2F-EHp:Y6 solar cells gave a 16.02% PCE. Guo et al. synthesized a random copolymer S1 with a fluorine and ester group functionalized thiophene (FE-T) unit[14]. Owing to the strong electron-withdrawing property of FE-T, S1 has a deep HOMO level and delivered a high open-circuit voltage (Voc) of 0.88 V and a PCE of 16.42%. Ding et al. developed a 2.16 eV ultra-WBG copolymer W1 by using a fluorinated 1,2-dialkoxybenzene (FAB) unit[15]. The FAB unit offers unique $ {\rm{S}} \cdots {\rm{O}} $ and $ {\rm{F}} \cdots {\rm{H}} $ double-side conformation locking in the copolymer backbone, and renders W1 enhanced packing and good hole-transporting capability[16]. W1:Y6 solar cells gave a PCE of 16.23%. Ding et al. also developed several high-performance WBG copolymer donors based on fused-ring acceptor units. The WBG copolymer L1 based on a fused-ring lactone unit 5H-dithieno[3,2-b:2',3'-d]pyran-5-one (DTP) delivered a 14.36% PCE[17]. A fused-ring thiolactone copolymer D16 based on the 5H-dithieno[3,2-b:2',3'-d]thiopyran-5-one (DTTP) unit gave a higher PCE of 16.72%[18]. By using a dithieno[3',2':3,4;2'',3'':5,6]benzo[1,2-c][1,2,5]thiadiazole (DTBT) unit, which has a larger molecular plane than DTP and DTTP, Ding et al. developed a more efficient WBG copolymer donor D18[19]. D18:Y6 solar cells gave a PCE of 18.22% (certified 17.6%). This is the first time for the PCE of OSCs surpassing 18%. Thick-film D18:Y6:PC61BM ternary cells delivered 16% PCEs with an active layer thickness over 300 nm[20]. Ding et al. further reported a chlorinated analogue of D18, the D18-Cl[21]. Blending D18-Cl with a nonfullerene acceptor N3 yielded a PCE of 18.13% (certified 17.6%). Very recently, Ding et al. pushed the PCE to 18.56% (certified 17.9%) by blending D18 with N3, setting a new PCE record[7]. These works demonstrated the advantages of fused-ring acceptor units in constructing WBG copolymer donors. The strong electron-withdrawing capability and extended molecular planes of these acceptor units gift copolymers deep HOMO levels, enhanced packing and high hole mobility, thus leading to improved Voc, short-circuit current density (Jsc) and fill factor (FF) in solar cells. In this work, we report copolymers P1 and P2 based on a dithieno[3',2':3,4;2'',3'':5,6]benzo[1,2-c][1,2,5]oxadiazole (DTBO) unit (Fig. 1(a)). Compared with DTBT, DTBO has fewer synthetic steps and is more cost-effective[22]. DFT calculations indicate that DTBO renders the copolymer a deeper HOMO level, thus yielding higher Voc in solar cells. Solar cells with P1 and P2 as the donors and Y6 as the acceptor afforded high Voc up to 0.91 V and decent PCEs up to 15.64%.

Figure  1.  (Color online) (a) DTBT and DTBO building blocks, and DTBO-based copolymers P1 and P2. (b) Molecular models and corresponding frontier molecular orbitals and energy levels for D18, P1 and P2. (c) J–V curves for P1:Y6 and P2:Y6 solar cells. (d) EQE spectra for P1:Y6 and P2:Y6 solar cells.

We built the polymer models for D18, P1 and P2 (Fig. 1(b)). Each model has two repeating units, and the alkyl chains were replaced by methyl groups for saving the calculation time. All structures were optimized at the B3LYP/6-31G(d) level. The DFT-predicted frontier molecular orbitals and energy levels for D18, P1 and P2 are shown in Fig. 1(b). From D18 to P1, DTBT being replaced by DTBO, simultaneous decrease in HOMO and LUMO energy levels was observed. The HOMO and LUMO levels for P1 are –5.05 and –2.69 eV, respectively, which are ~0.1 eV lower than that of D18. A higher Voc was expected for P1-based solar cells since Voc is proportional to the energy difference between donor HOMO and acceptor LUMO[23]. Compared with P1, P2 shows higher HOMO and LUMO levels of –4.94 and –2.61 eV, respectively, due to the removal of electron-withdrawing fluorine atoms. For P1 and P2, the variation trends in DFT-predicted HOMO and LUMO levels are consistent with those from cyclic voltammetry (CV) measurements (vide infra).

The synthetic routes for P1 and P2 are shown in Scheme S1. The 5,8-dibromodithieno[3',2':3,4;2'',3'':5,6]benzo[1,2-c][1,2,5]oxadiazole (DTBO-Br) coupled with tributyl(4-(2-butyloctyl)thiophen-2-yl)stannane gave compound 1 in 62% yield. Bromination of compound 1 with NBS gave compound 2 in 80% yield. Copolymerization of compound 2 with (4,8-bis(5-(2-ethylhexyl)-4-fluorothiophen-2-yl)benzo[1,2-b:4,5-b']dithiophene-2,6-diyl)bis(trimethylstannane) (FBDT-Sn) and (4,8-bis(5-(2-ethylhexyl)thiophen-2-yl)benzo[1,2-b:4,5-b']dithiophene-2,6-diyl)bis(trimethylstannane) (BDT-Sn) gave P1 and P2 in 90% and 58% yield, respectively. The number-average molecular weights (Mn) for P1 and P2 are 38.0 and 47.0 kDa, respectively, with the polydispersity indexes (PDI) of 2.08 and 1.67, respectively. P1 and P2 are soluble in chloroform and chlorobenzene. The absorption spectra for P1, P2 and Y6 films are shown in Fig. S7. Both P1 and P2 show two absorption peaks, with a high-energy peak at 545 and 549 nm, respectively, and a low-energy peak at 582 and 590 nm, respectively. The absorption band for P1 and P2 lies in 400–620 nm region, which is complementary with that of Y6 (560–920 nm). The absorption onsets for P1 and P2 films are 626 and 633 nm, respectively, corresponding to optical bandgaps (Egopt) of 1.98 and 1.96 eV, respectively. Energy levels for P1 and P2 were estimated from CV measurements (Fig. S8). The HOMO and LUMO levels for P1 and P2 were calculated from the onset potentials of oxidation (Eonox) and reduction (Eonred), respectively, i.e., HOMO = –(Eonox + 4.8) and LUMO = –(Eonred + 4.8). The energy level diagram is presented in Fig. S9. P1 and P2 show deep HOMO levels of –5.61 and –5.45 eV, respectively, which are favorable for producing high Voc in solar cells. The HOMO level of P1 is 0.1 eV deeper than that of D18 (–5.51 eV)[19], consisting with DFT calculation.

Solar cells with a structure of ITO/PEDOT:PSS/polymer:Y6/PDIN/Ag were made to evaluate the performance of P1 and P2. The D/A ratio, active layer thickness and additive (1-chloronaphthalene) content were optimized (Tables S1–S6). J–V curves and external quantum efficiency (EQE) spectra for the best cells are shown in Figs. 1(c) and 1(d), respectively. The best P1:Y6 cells gave a PCE of 10.92%, with a Voc of 0.91 V, a Jsc of 18.22 mA cm–2 and a FF of 65.7%. These cells have a D/A ratio of 1 : 1.6 (w/w), an active layer thickness of 110 nm and no additive. The best P2:Y6 cells gave a PCE of 15.64%, with a Voc of 0.83 V, a Jsc of 26.72 mA cm–2 and a FF of 70.6%. These cells have a D/A ratio of 1 : 1.6 (w/w), an active layer thickness of 120 nm and no additive. The Voc of P1:Y6 cells is 0.05 V higher than that of D18:Y6 cells[19], suggesting the advantage of DTBO unit in enhancing Voc. The P2:Y6 cells present much better performance than P1:Y6 cells due to the higher Jsc and FF. P2 cells afforded higher EQE than P1 cells in the whole spectrum, with the maximum EQE of 86% at 560 nm (Fig. 1(d)). The integrated current densities for P1 and P2 cells are 17.56 and 25.75 mA cm–2, respectively, consistent with Jsc from J–V measurements. The exciton dissociation probabilities (Pdiss) for P1 and P2 cells are 96.3% and 98.4%, respectively, suggesting more efficient carrier generation in the latter (Fig. S10)[24]. Higher Jsc and FF for P2 cells suggest a superior charge-transporting capability of P2. Hole mobilities (μh) were measured for pure P1 and P2 films by using space-charge limited current (SCLC) method (Fig. S11)[25-27]. The μh for P1 and P2 are 5.13 × 10–4 and 8.82 × 10–4 cm2 V–1 s–1, respectively, confirming the better hole-transporting capability of P2. The μh and the electron mobilities (μe) were also measured for the blend films (Figs. S12 and S13). Compared with P1:Y6 film, P2:Y6 film gave a higher μh of 3.92 × 10–4 cm2 V–1 s–1, a higher μe of 2.97 × 10–4 cm2 V–1 s–1, and a smaller μh/μe of 1.32 (Table S7). We investigated bimolecular recombination by plotting Jsc against light intensity (Plight) (Fig. S14)[28-31]. P2:Y6 cells showed a α value of 0.985, which is closer to 1 than that of P1:Y6 cells (0.973), suggesting less bimolecular recombination in P2:Y6 cells. The faster and more balanced charge transport as well as less charge recombination in P2:Y6 cells account for the higher FF. The morphology for P1:Y6 and P2:Y6 blend films was studied by using atomic force microscope (AFM) (Fig. S15). Both films present nanofiber structures. Compared with P1:Y6 film, P2:Y6 film has a smoother surface. The root-mean-square roughnesses for P1:Y6 and P2:Y6 films are 1.20 and 1.02 nm, respectively.

In summary, a fused-ring acceptor unit DTBO was developed. Compared with previously reported DTBT unit, DTBO can lower the HOMO level of polymer donors, thus increasing the Voc of solar cells. DTBO-based copolymers delivered a maximum Voc of 0.91 V and a maximum PCE of 15.64%.

This work was supported by the National Key Research and Development Program of China (2017YFA0206600, SQ2020YFE010701), the National Natural Science Foundation of China (51773045, 21772030, 51922032, 21961160720, 51473053) and the Natural Science Foundation of Hunan Province (2019JJ50603).

Supplementary materials to this article can be found online at https://doi.org/1674-4926/42/6/060501https://doi.org/1674-4926/42/6/060501.



[1]
Faist J, Capasso F, Sivco D L, et al. Quantum cascade laser. Science, 1994, 264: 553 doi: 10.1126/science.264.5158.553
[2]
Vitiello M S, Scalari G, Williams B, et al. Quantum cascade lasers: 20 years of challenges. Optics Express, 2015, 23: 5167 doi: 10.1364/OE.23.005167
[3]
Kazarinov R F, Suris R. Possibility of amplification of electromagnetic waves in a semiconductor with a superlattice. Soviet Phys, 1971, 5: 707
[4]
Kastalsky A, Goldman V, Abeles J. Possibility of infrared laser in a resonant tunneling structure. Appl Phys Lett, 1991, 59: 2636 doi: 10.1063/1.105922
[5]
Razeghi M, Lu Q Y, Bandyopadhyay N, et al. Quantum cascade lasers: from tool to product. Optics Express, 2015, 23: 8462 doi: 10.1364/OE.23.008462
[6]
Kosterev A A, ad Tittel F K. Chemical sensors based on quantum cascade lasers. IEEE J Quantum Electron, 2002, 38: 582 doi: 10.1109/JQE.2002.1005408
[7]
Liu C W, Zhai S Q, Zhang J C, et al. Free-space communication based on quantum cascade laser. J Semicond, 2015, 36: 094009 doi: 10.1088/1674-4926/36/9/094009
[8]
Kumar C, Patel C K N, Lyakh A. High power quantum cascade lasers for infrared countermeasures, targeting and illumination, beacons and standoff detection of explosives and CWAs. Proc SPIE, 2015, 9467: 946702 doi: 10.1117/12.2178050
[9]
Bai Y, Bandyopadhyay N, Tsao S et al. Room temperature quantum cascade lasers with 27% wall plug efficiency. Appl Phys Lett, 2011, 98: 181102 doi: 10.1063/1.3586773
[10]
Lu Q Y, Bai Y B, Bandyopadhyay N, et al. 2.4 W room temperature continuous wave operation of distributed feedback quantum cascade lasers. Appl Phys Lett, 2011, 98: 181106 doi: 10.1063/1.3588412
[11]
Lyakh A, Maulini R, Tsekoun A, et al. Tapered 4.7 μm quantum cascade lasers with highly strained active region composition delivering over 4.5 watts of continuous wave optical power. Opt Express, 2012, 20: 4382 doi: 10.1364/OE.20.004382
[12]
Beck M, Hofstetter D, Aellen T, et al. Continuous wave operation of a mid-infrared semiconductor laser at room temperature. Science, 2002, 295: 301 doi: 10.1126/science.1066408
[13]
Darvish S, Slivken S, Evans A, et al. Room-temperature, high-power, and continuous-wave operation of distributed-feedback quantum-cascade lasers at λ~9.6 μm. Appl Phys Lett, 2006, 88: 201114 doi: 10.1063/1.2205730
[14]
Baranov A N, Bahriz M, Teissier R. Room temperature continuous wave operation of InAs-based quantum cascade lasers at 15 μm. Opt Express, 2016, 24: 18799 doi: 10.1364/OE.24.018799
[15]
Fox M. Optical properties of solids. Am J Phys, 2002, 70: 1269
[16]
Troccoli M, Wang X, Fan J. Quantum cascade lasers: high-power emission and single-mode operation in the long-wave infrared (λ > 6 μm). Opt Eng, 2010, 49: 111106 doi: 10.1117/1.3498778
[17]
Troccoli M, Lyakh A, Fan J, et al. Long-wave IR quantum cascade lasers for emission in the λ = 8–12 μm spectral region. Opt Mater Express, 2013, 3: 1546 doi: 10.1364/OME.3.001546
[18]
Liang P, Liu F Q, Zhang J C, et al. High-power high-temperature continuous-wave operation of quantum cascade laser at λ~4.6 μm without lateral regrowth. Chin Phys Lett, 2012, 29: 074215 doi: 10.1088/0256-307X/29/7/074215
Fig. 2.  (Color online) (a) Output light power versus injection current of a 2-mm-long and 10-μm-wide QCL in CW operation mode at different heat sink temperatures between 283 and 303 K along with V–I curves at 293 K. (b) Peak power of the same device changes with the injection current at the repetition frequency of 5 kHz and a duty circle of 1%.

Fig. 1.  (Color online) Mode characteristic according to the real part of the refractive index along the growth direction of the device structure with a Drude–Lorentz solver.

Fig. 3.  (Color online) (a) CW emitting spectrum of QCL at different heat sink temperature between 283 and 303 K. The insert shows the electrical luminescence spectrum. (b) CW lasing spectra at a different injection current from 0.85 to 1.0 A with a step of 0.03 A. The inset shows the linear-fit tuning characteristics of the lasing frequency with electrical power for the same device.

Fig. 4.  (Color online) Threshold current density as a function of heat sink temperature in CW and pulsed mode of a 2-mm-long and 10-μm-wide LWIR QCL. The red line is fitted with the exponential function Jth = J0exp(T/T0).

Fig. 5.  (Color online) Measured lateral far-field radiation patterns for the devices at pulsed driving currents of 0.85 A under 50 kHz repetition frequency and 1% duty circle, the dash is the measurement and the red line is the result fitted with the Gauss function. The inset shows the spot of a laser beam emitted from the device collimated by the aspheric lens.

[1]
Faist J, Capasso F, Sivco D L, et al. Quantum cascade laser. Science, 1994, 264: 553 doi: 10.1126/science.264.5158.553
[2]
Vitiello M S, Scalari G, Williams B, et al. Quantum cascade lasers: 20 years of challenges. Optics Express, 2015, 23: 5167 doi: 10.1364/OE.23.005167
[3]
Kazarinov R F, Suris R. Possibility of amplification of electromagnetic waves in a semiconductor with a superlattice. Soviet Phys, 1971, 5: 707
[4]
Kastalsky A, Goldman V, Abeles J. Possibility of infrared laser in a resonant tunneling structure. Appl Phys Lett, 1991, 59: 2636 doi: 10.1063/1.105922
[5]
Razeghi M, Lu Q Y, Bandyopadhyay N, et al. Quantum cascade lasers: from tool to product. Optics Express, 2015, 23: 8462 doi: 10.1364/OE.23.008462
[6]
Kosterev A A, ad Tittel F K. Chemical sensors based on quantum cascade lasers. IEEE J Quantum Electron, 2002, 38: 582 doi: 10.1109/JQE.2002.1005408
[7]
Liu C W, Zhai S Q, Zhang J C, et al. Free-space communication based on quantum cascade laser. J Semicond, 2015, 36: 094009 doi: 10.1088/1674-4926/36/9/094009
[8]
Kumar C, Patel C K N, Lyakh A. High power quantum cascade lasers for infrared countermeasures, targeting and illumination, beacons and standoff detection of explosives and CWAs. Proc SPIE, 2015, 9467: 946702 doi: 10.1117/12.2178050
[9]
Bai Y, Bandyopadhyay N, Tsao S et al. Room temperature quantum cascade lasers with 27% wall plug efficiency. Appl Phys Lett, 2011, 98: 181102 doi: 10.1063/1.3586773
[10]
Lu Q Y, Bai Y B, Bandyopadhyay N, et al. 2.4 W room temperature continuous wave operation of distributed feedback quantum cascade lasers. Appl Phys Lett, 2011, 98: 181106 doi: 10.1063/1.3588412
[11]
Lyakh A, Maulini R, Tsekoun A, et al. Tapered 4.7 μm quantum cascade lasers with highly strained active region composition delivering over 4.5 watts of continuous wave optical power. Opt Express, 2012, 20: 4382 doi: 10.1364/OE.20.004382
[12]
Beck M, Hofstetter D, Aellen T, et al. Continuous wave operation of a mid-infrared semiconductor laser at room temperature. Science, 2002, 295: 301 doi: 10.1126/science.1066408
[13]
Darvish S, Slivken S, Evans A, et al. Room-temperature, high-power, and continuous-wave operation of distributed-feedback quantum-cascade lasers at λ~9.6 μm. Appl Phys Lett, 2006, 88: 201114 doi: 10.1063/1.2205730
[14]
Baranov A N, Bahriz M, Teissier R. Room temperature continuous wave operation of InAs-based quantum cascade lasers at 15 μm. Opt Express, 2016, 24: 18799 doi: 10.1364/OE.24.018799
[15]
Fox M. Optical properties of solids. Am J Phys, 2002, 70: 1269
[16]
Troccoli M, Wang X, Fan J. Quantum cascade lasers: high-power emission and single-mode operation in the long-wave infrared (λ > 6 μm). Opt Eng, 2010, 49: 111106 doi: 10.1117/1.3498778
[17]
Troccoli M, Lyakh A, Fan J, et al. Long-wave IR quantum cascade lasers for emission in the λ = 8–12 μm spectral region. Opt Mater Express, 2013, 3: 1546 doi: 10.1364/OME.3.001546
[18]
Liang P, Liu F Q, Zhang J C, et al. High-power high-temperature continuous-wave operation of quantum cascade laser at λ~4.6 μm without lateral regrowth. Chin Phys Lett, 2012, 29: 074215 doi: 10.1088/0256-307X/29/7/074215
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    Xiongfeng Li, Jingui Xu, Zuo Xiao, Xingzhu Wang, Bin Zhang, Liming Ding. Dithieno[3',2':3,4;2'',3'':5,6]benzo[1,2-c][1,2,5]oxadiazole-based polymer donors with deep HOMO levels[J]. Journal of Semiconductors, 2021, 42(6): 060501. doi: 10.1088/1674-4926/42/6/060501
    X F Li, J G Xu, Z Xiao, X Z Wang, B Zhang, L M Ding, Dithieno[3\',2\':3,4;2\'\',3\'\':5,6]benzo[1,2-c][1,2,5]oxadiazole-based polymer donors with deep HOMO levels[J]. J. Semicond., 2021, 42(6): 060501. doi: 10.1088/1674-4926/42/6/060501.
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    Received: 20 July 2017 Revised: 25 August 2017 Online: Uncorrected proof: 24 January 2018Published: 01 March 2018

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      Xiongfeng Li, Jingui Xu, Zuo Xiao, Xingzhu Wang, Bin Zhang, Liming Ding. Dithieno[3',2':3,4;2'',3'':5,6]benzo[1,2-c][1,2,5]oxadiazole-based polymer donors with deep HOMO levels[J]. Journal of Semiconductors, 2021, 42(6): 060501. doi: 10.1088/1674-4926/42/6/060501 ****X F Li, J G Xu, Z Xiao, X Z Wang, B Zhang, L M Ding, Dithieno[3\',2\':3,4;2\'\',3\'\':5,6]benzo[1,2-c][1,2,5]oxadiazole-based polymer donors with deep HOMO levels[J]. J. Semicond., 2021, 42(6): 060501. doi: 10.1088/1674-4926/42/6/060501.
      Citation:
      Chuncai Hou, Yue Zhao, Jinchuan Zhang, Shenqiang Zhai, Ning Zhuo, Junqi Liu, Lijun Wang, Shuman Liu, Fengqi Liu, Zhanguo Wang. Room temperature continuous wave operation of quantum cascade laser at λ ~ 9.4 μm[J]. Journal of Semiconductors, 2018, 39(3): 034001. doi: 10.1088/1674-4926/39/3/034001 ****
      C C Hou, Y Zhao, J C Zhang, S Q Zhai, N Zhuo, J Q Liu, L J Wang, S M Liu, F Q Liu, Z G Wang. Room temperature continuous wave operation of quantum cascade laser at λ ~ 9.4 μm[J]. J. Semicond., 2018, 39(3): 034001. doi: 10.1088/1674-4926/39/3/034001.

      Room temperature continuous wave operation of quantum cascade laser at λ ~ 9.4 μm

      DOI: 10.1088/1674-4926/39/3/034001
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      Project supported by the National Key Research And Development Program (No. 2016YFB0402303), the National Natural Science Foundation of China (Nos. 61435014, 61627822, 61574136, 61774146, 61674144, 61404131), the Key Projects of Chinese Academy of Sciences (Nos. ZDRW-XH-2016-4, QYZDJ-SSW-JSC027), and the Beijing Natural Science Foundation (No. 4162060, 4172060).

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