Chin. J. Semicond. > 2007, Volume 28 > Issue S1 > 348-351
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Influence of Deposition Parameters on Diamond Grain Size in DC Arc Plasma Jet CVD

Chen Guangchao, Lan Hao, Li Bin, Dai Fengwei, Askari J, Hei Lifu, Song Jianhua, Li Chengming, Tang Weizhong, Tong Yumei and Lü Fanxiu

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Abstract: Deposition parameters，like deposition distribution，chamber pressure，and ratio of CH‘/H2，are studied to influence grain size of diamond by DC Arc Plasma Jet CVD.It is found that increase of grain size will occur under the condition of decrease of deposition temperature and increase of chamber pressure. The largest grain size is found over 1mm.Crystalline grain with facets occurs at 20％of CI-h/Hz.

Key words: diamond, grain size plasma jet CVD

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    Received: 27 May 2016 Revised: Online: Published: 01 January 2007

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      Article Navigation >  Journal of Semiconductors  > 2007  >  28(S1): 348-351
      Chen Guangchao, Lan Hao, Li Bin, Dai Fengwei, Askari J, Hei Lifu, Song Jianhua, Li Chengming, Tang Weizhong, Tong Yumei, Lü Fanxiu. Influence of Deposition Parameters on Diamond Grain Size in DC Arc Plasma Jet CVD[J]. Journal of Semiconductors, 2007, 28(S1): 348-351. ****Chen G C, Lan H, Li B, Dai F W, A J, Hei L F, Song J H, Li C M, Tang W Z, Tong Y M, Lü F. Influence of Deposition Parameters on Diamond Grain Size in DC Arc Plasma Jet CVD[J]. Chin. J. Semicond., 2007, 28(S1): 348.
      Citation:
      Chen Guangchao, Lan Hao, Li Bin, Dai Fengwei, Askari J, Hei Lifu, Song Jianhua, Li Chengming, Tang Weizhong, Tong Yumei, Lü Fanxiu. Influence of Deposition Parameters on Diamond Grain Size in DC Arc Plasma Jet CVD[J]. Journal of Semiconductors, 2007, 28(S1): 348-351. ****
      Chen G C, Lan H, Li B, Dai F W, A J, Hei L F, Song J H, Li C M, Tang W Z, Tong Y M, Lü F. Influence of Deposition Parameters on Diamond Grain Size in DC Arc Plasma Jet CVD[J]. Chin. J. Semicond., 2007, 28(S1): 348.
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      Influence of Deposition Parameters on Diamond Grain Size in DC Arc Plasma Jet CVD

      • University of Science and Technology of Beijing，Beijing 100083，China,University of Science and Technology of Beijing，Beijing 100083，China,University of Science and Technology of Beijing，Beijing 100083，China,University of Science and Technology of Beijing，Beijing 100083，China,University of Science and Technology of Beijing，Beijing 100083，China,University of Science and Technology of Beijing，Beijing 100083，China,University of Science and Technology of Beijing，Beijing 100083，China,University of Science and Technology of Beijing，Beijing 100083，China,University of Science and Technology of Beijing，Beijing 100083，China,University of Science and Technology of Beijing，Beijing 100083，China and University of Science and Technology of Beijing，Beijing 100083，China

      • Received Date: 2016-05-27
      • Published Date: 2016-04-28

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