Chin. J. Semicond. > 1989, Volume 10 > Issue 9 > 667-671
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用离子束混合及快速热处理方法形成钽的硅化物

姚文卿 and Heiner Ryssel

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1989

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      Article Navigation >  Journal of Semiconductors  > 1989  >  10(9): 667-671
      姚文卿, Heiner Ryssel. 用离子束混合及快速热处理方法形成钽的硅化物[J]. 半导体学报(英文版), 1989, 10(9): 667-671.
      Citation:
      姚文卿, Heiner Ryssel. 用离子束混合及快速热处理方法形成钽的硅化物[J]. 半导体学报(英文版), 1989, 10(9): 667-671.
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      • Received Date: 2015-08-19

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