Chin. J. Semicond. > 2004, Volume 25 > Issue 12 > 1576-1579
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SiGe共振腔增强型探测器的制备(英文)

李传波 , 毛荣伟 , 左玉华 , 成步文 , 时文华 , 赵雷 , 罗丽萍 , 余金中 and 王启明

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Key words: RCE, 探测器, SOI, SiGe

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(12): 1576-1579
      李传波, 毛荣伟, 左玉华, 成步文, 时文华, 赵雷, 罗丽萍, 余金中, 王启明. SiGe共振腔增强型探测器的制备(英文)[J]. 半导体学报(英文版), 2004, 25(12): 1576-1579.
      Citation:
      李传波, 毛荣伟, 左玉华, 成步文, 时文华, 赵雷, 罗丽萍, 余金中, 王启明. SiGe共振腔增强型探测器的制备(英文)[J]. 半导体学报(英文版), 2004, 25(12): 1576-1579.
      shu

      • Received Date: 2015-08-19

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