Citation: |
张向东, 黄信凡, 陈坤基. Ar~+激光结晶非晶硅膜电学性质研究[J]. 半导体学报(英文版), 1992, 13(1): 36-41.
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Received: 19 August 2015 Revised: Online: Published: 01 January 1992
Citation: |
张向东, 黄信凡, 陈坤基. Ar~+激光结晶非晶硅膜电学性质研究[J]. 半导体学报(英文版), 1992, 13(1): 36-41.
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