Chin. J. Semicond. > 2005, Volume 26 > Issue 4 > 816-820
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具有多运动自由度的新型多功能微镜

余洪斌 and 陈海清

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Key words: 微机电系统, 微镜, 相位调制, 强度调制, T型梁

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(4): 816-820
      余洪斌, 陈海清. 具有多运动自由度的新型多功能微镜[J]. 半导体学报(英文版), 2005, 26(4): 816-820.
      Citation:
      余洪斌, 陈海清. 具有多运动自由度的新型多功能微镜[J]. 半导体学报(英文版), 2005, 26(4): 816-820.
      shu

      • Received Date: 2015-08-19

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