| Citation: |
Lao Yanfeng, Wu Huizhen, Huang Zhanchao, Liu Cheng, Cao Meng. Optical Properties of Direct Wafer Bonded Micro-Cavity Structures[J]. Journal of Semiconductors, 2006, 27(S1): 304-308.
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Lao Y F, Wu H Z, Huang Z C, Liu C, Cao M. Optical Properties of Direct Wafer Bonded Micro-Cavity Structures[J]. Chin. J. Semicond., 2006, 27(13): 304.
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Optical Properties of Direct Wafer Bonded Micro-Cavity Structures
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Abstract
Fabry-Perot micro-cavity resonator structures are directly wafer bonded.Their optical properties of reflectivity are measured using Fourier-transform infrared spectroscopy and simulated theoretically using transfer matrix method.An exponential variation of optical thickness for multi-layers at the both sides of the bonding interface is constructed to analyze the effects of wafer-bonding on the micro-cavity structures.Results show that lower-temperature bonding is advantageous for the fabrication of high-optical quality structures.But a defect-blocking layer should be involved into the wafer-boned structures for the improvement of bonding quality when a higher annealing temperature is used. -
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