Chin. J. Semicond. > 1983, Volume 4 > Issue 2 > 171-180
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半导体多层结构的热应变弯曲和层应力

冯哲川 and 刘弘度

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    Received: 20 August 2015 Revised: Online: Published: 01 February 1983

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      Article Navigation >  Journal of Semiconductors  > 1983  >  4(2): 171-180
      冯哲川, 刘弘度. 半导体多层结构的热应变弯曲和层应力[J]. 半导体学报(英文版), 1983, 4(2): 171-180.
      Citation:
      冯哲川, 刘弘度. 半导体多层结构的热应变弯曲和层应力[J]. 半导体学报(英文版), 1983, 4(2): 171-180.
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      • Received Date: 2015-08-20

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