Citation: |
程迎军, 蒋玉齐, 许薇, 罗乐. 焊料键合实现MEMS真空封装的模拟[J]. 半导体学报(英文版), 2005, 26(5): 1033-1039.
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Received: 19 August 2015 Revised: Online: Published: 01 May 2005
Citation: |
程迎军, 蒋玉齐, 许薇, 罗乐. 焊料键合实现MEMS真空封装的模拟[J]. 半导体学报(英文版), 2005, 26(5): 1033-1039.
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