Chin. J. Semicond. > 1991, Volume 12 > Issue 8 > 469-476
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硅中氧的结构组态及热扩散行为

陈畅生 , 曾繁清 , 熊传铭 and 沈学础

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    Received: 19 August 2015 Revised: Online: Published: 01 August 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(8): 469-476
      陈畅生, 曾繁清, 熊传铭, 沈学础. 硅中氧的结构组态及热扩散行为[J]. 半导体学报(英文版), 1991, 12(8): 469-476.
      Citation:
      陈畅生, 曾繁清, 熊传铭, 沈学础. 硅中氧的结构组态及热扩散行为[J]. 半导体学报(英文版), 1991, 12(8): 469-476.
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      • Received Date: 2015-08-19

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