Chin. J. Semicond. > 1986, Volume 7 > Issue 4 > 374-379
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CVD BPSG膜的沉积及其回流机理

曾天亮 and 江志庚

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    Received: 20 August 2015 Revised: Online: Published: 01 April 1986

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      Article Navigation >  Journal of Semiconductors  > 1986  >  7(4): 374-379
      曾天亮, 江志庚. CVD BPSG膜的沉积及其回流机理[J]. 半导体学报(英文版), 1986, 7(4): 374-379.
      Citation:
      曾天亮, 江志庚. CVD BPSG膜的沉积及其回流机理[J]. 半导体学报(英文版), 1986, 7(4): 374-379.
      shu

      • Received Date: 2015-08-20

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