Chin. J. Semicond. > 1994, Volume 15 > Issue 1 > 23-28
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硅表面氧化膜的X光电子谱及部分参数固定法曲线拟合

季振国 and 汪雷，袁骏

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    Received: 18 August 2015 Revised: Online: Published: 01 January 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(1): 23-28
      季振国, 汪雷，袁骏. 硅表面氧化膜的X光电子谱及部分参数固定法曲线拟合[J]. 半导体学报(英文版), 1994, 15(1): 23-28.
      Citation:
      季振国, 汪雷，袁骏. 硅表面氧化膜的X光电子谱及部分参数固定法曲线拟合[J]. 半导体学报(英文版), 1994, 15(1): 23-28.
      shu

      • Received Date: 2015-08-18

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