Chin. J. Semicond. > 1994, Volume 15 > Issue 4 > 268-272
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MOCVD过程中回流现象的数值模拟

张佳文，高鸿楷，张济康，杨永

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    Received: 18 August 2015 Revised: Online: Published: 01 April 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(4): 268-272
      张佳文，高鸿楷，张济康，杨永. MOCVD过程中回流现象的数值模拟[J]. 半导体学报(英文版), 1994, 15(4): 268-272.
      Citation:
      张佳文，高鸿楷，张济康，杨永. MOCVD过程中回流现象的数值模拟[J]. 半导体学报(英文版), 1994, 15(4): 268-272.
      shu

      • Received Date: 2015-08-18

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