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邵乐喜, 谢二庆, 路永刚, 贺德衍, 陈光华. 氮生长掺杂和离子注入掺杂CVD金刚石薄膜的场电子发射[J]. 半导体学报(英文版), 1999, 20(9): 780-785.
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Received: 19 August 2015 Revised: Online: Published: 01 September 1999
Citation: |
邵乐喜, 谢二庆, 路永刚, 贺德衍, 陈光华. 氮生长掺杂和离子注入掺杂CVD金刚石薄膜的场电子发射[J]. 半导体学报(英文版), 1999, 20(9): 780-785.
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