Chin. J. Semicond. > 2005, Volume 26 > Issue 4 > 740-744
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Al2O3陶瓷上金刚石膜生长工艺优化及α粒子响应

楼燕燕 , 王林军 , 张明龙 , 顾蓓蓓 , 苏青峰 , 夏义本燕 and 夏义本

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Key words: 粒子探测器, 金刚石, 介电系数, 氧化铝

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(4): 740-744
      楼燕燕, 王林军, 张明龙, 顾蓓蓓, 苏青峰, 夏义本燕, 夏义本. Al2O3陶瓷上金刚石膜生长工艺优化及α粒子响应[J]. 半导体学报(英文版), 2005, 26(4): 740-744.
      Citation:
      楼燕燕, 王林军, 张明龙, 顾蓓蓓, 苏青峰, 夏义本燕, 夏义本. Al2O3陶瓷上金刚石膜生长工艺优化及α粒子响应[J]. 半导体学报(英文版), 2005, 26(4): 740-744.
      shu

      • Received Date: 2015-08-19

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