| Citation: |
Fang Dongming, Zhou Yong, Zhao Xiaolin. Fabrication of a High-Performance Solenoid Microinductor[J]. Journal of Semiconductors, 2006, 27(8): 1422-1425.
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Fang D M, Zhou Y, Zhao X L. Fabrication of a High-Performance Solenoid Microinductor[J]. Chin. J. Semicond., 2006, 27(8): 1422.
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Fabrication of a High-Performance Solenoid Microinductor
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Abstract
A high-performance RF solenoid microinductor is fabricated using microelectromechanical systems technology.This inductor employs an electroplated copper coil to reduce the series resistance,and its total area is 880μm×350μm,which saves chip area significantly compared with planar microinductors.The measurement results show that this inductor has a high Q-factor over a wide range of operating frequencies.The maximum Q-factor of this inductor is 38 and the inductance is 1.82nH at 6GHz.-
Keywords:
- solenoid inductor,
- RF MEMS,
- quality factor,
- three-dimension
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References
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Proportional views
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