Chin. J. Semicond. > 2001, Volume 22 > Issue 4 > 476-480

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Key words: 二维电子气, 电子束光刻, 混合曝光, PHEMT, T型栅

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    Received: 20 August 2015 Revised: Online: Published: 01 April 2001

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      郑英奎, 刘明, 和致经, 吴德馨. 0.1μmT型栅PHEMT器件[J]. 半导体学报(英文版), 2001, 22(4): 476-480.
      Citation:
      郑英奎, 刘明, 和致经, 吴德馨. 0.1μmT型栅PHEMT器件[J]. 半导体学报(英文版), 2001, 22(4): 476-480.

      • Received Date: 2015-08-20

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