Chin. J. Semicond. > 1997, Volume 18 > Issue 2 > 81-84

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用STM研究HF,O_2和H_2O混合气体对Si(100)表面的作用

梁励芬 and 董树忠

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    Received: 19 August 2015 Revised: Online: Published: 01 February 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(2): 81-84
      梁励芬, 董树忠. 用STM研究HF,O_2和H_2O混合气体对Si(100)表面的作用[J]. 半导体学报(英文版), 1997, 18(2): 81-84.
      Citation:
      梁励芬, 董树忠. 用STM研究HF,O_2和H_2O混合气体对Si(100)表面的作用[J]. 半导体学报(英文版), 1997, 18(2): 81-84.
      shu

      • Received Date: 2015-08-19

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